SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 35
3
INSTALLATION
A.
Rated speed setting mode E.
DSW-B No.1 ON
B.
Set value of rated speed F.
Change speed by turning VR1 volume
C.
Pump internal temperature Determine speed by pressing "START" switch
D.
Pump state
*1
G.
Press "SELECT" switch
*1
: The STP pump state is displayed depends on the pump’s operation state.
Examples: "LEVITATION" (LEVITATION state)
"ACCEL: ***00rpm" (ACCELERATION state)
"NORMAL: ***00rpm" (NORMAL OPERATION state)
"BRAKE: ***00rpm" (BRAKE state)
Note: The rated speed returns to 48,000 rpm
*2
(initial setting) by setting dip switch 1 of DSW-B to
"OFF".
Figure 26 - LCD message in rated speed setting mode
*2
44,000 rpm with SCU-350D/350DA
PUMP TEMP: **°C
G
A
B
C
G
G
G
D
E
F