Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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4
OPERATION
4.5.11 Starting the STP pump after a safety function operates (CON4)
A safety function operates when an abnormality occurs in the STP pump or peripheral equipment. To
restart the STP pump, remove the cause of the abnormality after the "BRAKE" LED distinguishes, and
perform either operation shown in Table 19. The "FAILURE" LED distinguishes and the safety function
is released (RESET operation). Then, start the STP pump. For the safety functions and troubleshooting,
see Section 5, "MAINTENANCE".
Reset operation
Input 24 V DC between (2)‐(14) (pin for reset signal) for 0.3 seconds
or more.
Connect the (+) side to (2), and the (-) side to (14).
Table 19 - Reset Operation during Remote Operation (CON4)
4.6 Powering OFF
Switch "OFF" the breaker on the rear panel when all three LEDs of "ACCEL.", "NORMAL", and
"BRAKE" are off. The magnetic bearing stops, the rotor lands, and the "POWER" LED distinguishes
(POWER OFF state).
CAUTION
NEVER switch OFF the breaker when any LED of "ACCEL.", "NORMAL", and "BRA
KE" is on. Doing
so causes such a state as a power failure.