Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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4
OPERATION
4.2 Powering ON
4.2.1 Self test
Refer to Figure 27.
1. Switch the MAIN POWER to "ON", located on the SCU-350 rear panel, refer to Figure 11. (To
prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the
metal fitting and secure it.) The SCU-350 performs a self test and "SELF TEST" is displayed on the
LCD.
2. If no error is found, the LCD displays "TEST COMPLETE" and the magnetic bearing is turned "ON".
When the rotor levitates normally, the LCD displays "LEVITATION" and the STP pump can be
operated.
4.3 How to start/stop the STP pump
There are two methods of operating the STP pump; MANUAL and REMOTE. Select one which suits
your vacuum equipment.
4.4 Manual start/stop the STP pump
To manually start/stop the STP pump, slide the "MANUAL/REMOTE" changeover switch on the
SCU-350 front panel from the "ON" position, refer to Figure 10. The "REMOTE" LED will extinguish.
4.4.1 Starting the STP pump
1. Press the "START" switch on the front panel to start, refer to Figure 10 and accelerate the STP
pump. The "ACCEL." LED illuminates. The LCD displays the current rotational speed in "ACCEL:
***00rpm" in 500 rpm intervals. (ACCELERATION state)
2. When the STP pump attains the rated speed of rotation, the "ACCEL." LED extinguishes, and the
"NORMAL" LED illuminates. The LCD displays "NORM: ***00rpm". (NORMAL OPERATION state)
Note: The STP pump can be manually started only when the LCD displays "LEVITATION" or
"BRAKE: ***00rpm". In the case of another message displayed, press the "SELECT" switch
one or more times until "LEVITATION" or "BRAKE: ***00rpm" is displayed.
Note: Although the STP pump sounds for several seconds while it is accelerating, this is not an
indication of abnormality.