SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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INSTALLATION
3.12 LCD display state
3.12.1 Display items
The following items can be checked on the LCD:
1. Operation status
Levitation State "LEVITATION"
Acceleration state "ACCEL: ***00rpm"
Normal operation state "NORMAL: ***00rpm"
Break stare "BRAKE: ***00rpm”
2. Rotational speed setting value
3. Actual pump internal temperature
3.12.2 Display method
Refer to Figure 25.
Press the "SELECT" switch to display the menu groups in order.
A.
Operation status C.
Actual pump internal temperature
B.
Rotational speed setting value D.
Press "SELECT" switch
Figure 25 - LCD display state
PUMP TEMP: **°C
D
A
B
C
D
D