Edwards SCU-350 Series

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SCU-350 Series Control Unit for Turbomolecular Pump

MT-21E-201-E

Page 31

INSTALLATION

Breaker ON D.

LEVITATION

Execute self test E.

Tuning compete

Levitation state F.

Press RESET switch for 3 sec.

Figure 24 - Tuning procedures

P021* ver.*.**

SELF

EST

TUNING COMPLETE

EST

COMPLETE

TUNING!

RATING: ***00rpm

LEVITATION

Main Page

Table of Contents5
Introduction11
Scope and Definitions11
Applied Standards12
Limited Warranty13
- Warranty Period13
- Item Warranted13
- Disclaimer13
- Spare Parts14
High Voltage Device Caution Label14
Safety Instruction Label14
Caution Label14
Labels14
Connector Caution Label15
Label Affixing Positions16
Turbomolecular Pumps17
- Cable Sets18
General Description17
Control Unit18
Technical Data19
Control Unit Specifications19
- Specifications20
Dimensions (MM)20
External Appearance of SCU-35022
Front Panel23
Installation23
Unpacking23
Front Panel Functions23
O TB1 Terminal Block25
O TB2 Terminal Block25
Rear Panel Function25
- Rear Panel25
Top Panel26
Top Panel Function26
Left Side Panel27
Precautions before Installation28
- Operating Environment28
- Installation Area29
Example of Securing the SCU-35030
Attaching the SCU-350 to a Rack30
Cable Connection31
- STP Connection Cable32
STP Pump Connection Cable32
- Power Cable33
Power Cable (Without Plug)33
Power Cable (with Plug)34
How to Secure the Power Cable36
Connecting to Semiconductor Equipment37
- Connecting to Power37
- Emergency off Circuit (EMO Circuit)37
CON4 Connector38
- 3.10.3 Serial Communication39
Remote Communication38
- 3.10.1 Parallel Communication38
Tuning40
- 3.11.2 Tuning Method40
LCD Display State42
Confirmation Mode42
- 3.12.1 Display Items42
- Confirmation Method42
Setting the Rated Speed43
- 3.13.1 When Setting DSW-B No. 1 to on under Power-On State43
- 3.13.2 When Setting DSW-B No. 1 to on before Powering on44
LCD Message in Rated Speed Setting Mode45
Operation47
Before Starting the STP Pump47
- Confirmation before Starting47
- Confirmation of Vacuum System47
Powering on48
- Self Test48
How to Start/Stop the STP Pump48
Manual Start/Stop the STP Pump48
- Starting the STP Pump48
- Stopping the STP Pump49
- Starting the STP Pump after Stopping49
- Starting the STP Pump after a Safety Function Operates49
Remote Operation51
- I/O TB2 Terminal Block51
- I/O TB1 Terminal Block54
Rated Contacts for Relays CR158
Rated Contacts for Relays CR458
- CON4 Connector (for SCU-350H/350HA Only)59
- 4.5.3.1 Remote Input Signals59
CON4 Connector (Remote Input Signal)60
- 4.5.3.2 Remote Output Signals62
CON 4 Connector (Remote Output Signal)63
- Remote Cables for CON4 (for SCU-350H/350HA Only)65
Rated Contacts for Relays CR4, 5, 6, 7, 8, 9 and65
- Remote Setting66
- Starting/Stopping the STP Pump (I/O TB2)66
Starting/Stopping the STP Pump During Remote Operation (I/O TB2)66
- Starting the STP Pump after Stopping (I/O TB2)67
- Starting the STP Pump after a Safety Function Operates (I/O TB2)67
- Starting/Stopping the STP Pump (CON4)67
- Starting the STP Pump after Stopping (CON4)67
Reset Operation During Remote Operation (I/O TB2)67
Starting/Stopping the STP Pump During Remote Operation (CON4)67
- Starting the STP Pump after a Safety Function Operates (CON4)68
Reset Operation During Remote Operation (CON4)68
Powering off68
RS232 Port (CON3)69
Serial Communication Protocol69
Introduction69
Setting up69
- Hardware Connections69
O TB2 Terminal Block70
O TB1 Terminal Block70
- Pin Assignments71
- Serial Settings71
STP Control Unit Rear Panel70
Pin Assignments of Serial Interface Cable (25Pin-25Pin)71
Pin Assignments of Serial Interface Cable (25Pin-9Pin)71
Serial Parameter71
- Communication Mode72
Setting of DSW-B72
- Recommended Items about Communication Cable Installation73
Grounding Example (both Ends Grounding)73
Grounding Example (Single Point Grounding)73
Serial Protocol on the STP75
- SIM Replies to Queries or Commands76
Serial Protocol75
- Overview75
- Sending a Command or Query to the SIM75
Command Syntax76
- Queries77
- List of Queries77
- Description of Individual Queries77
Commands79
- List of Commands79
- Description of Individual Commands79
- Error Message80
Data Formats81
- Pump State81
- Alarm State81
- Alarm Type82
- SIM Control State83
- Parameters83
Maintenance85
Safety Functions85
- Power Failure85
- Operation after a Power Recovery86
States of LCD, Leds and REMOTE Output Signals86
- Abnormal State of Magnetic Bearing87
- Excessive Vibration87
- Motor Driver Overload87
- Overheating Inside the STP Pump87
- Overheating Inside the SCU-35087
- Overspeed88
- Error Messages88
- 6.1.10 Troubleshooting Immediately after Power Failure Occurs88
- 6.1.11 Troubleshooting Immediately after Other Abnormality/Errors Occur89
Troubleshooting When Powering on94
Troubleshooting When Performing the STP Pump Start Operation94
When Error Message Is Not Displayed on LCD94
- Abnormalities When Powering on94
- Abnormalities When Performing Rotational Operation94
Displaying Past Abnormalities/Errors and Accumulated Running-Time95
- Display Method95
Error Records95
Maintenance and Inspection96
- Cleaning96
- Maintenance97
Storage, Transportation and Disposal99
Storage of the SCU-35099
Transporting for Repair or Overhaul99
Disposal100
Service, Spares and Accessories101
Introduction101
Service101
Spares101
Power Cable102
Accessories102

Edwards SCU-350 Series

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