Edwards SCU-350 Series

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SCU-350 Series Control Unit for Turbomolecular Pump

MT-21E-201-E

Page 5

INTRODUCTION

4. Connector caution label

This label describes lock of the connector.

The label instructs operators to prevent the connectors from being disconnected while the STP

pump is in operation.

Figure 4 - Connector caution label

Main Page

Table of Contents5
Introduction11
Scope and Definitions11
Applied Standards12
Limited Warranty13
- Warranty Period13
- Item Warranted13
- Disclaimer13
- Spare Parts14
High Voltage Device Caution Label14
Safety Instruction Label14
Caution Label14
Labels14
Connector Caution Label15
Label Affixing Positions16
Turbomolecular Pumps17
- Cable Sets18
General Description17
Control Unit18
Technical Data19
Control Unit Specifications19
- Specifications20
Dimensions (MM)20
External Appearance of SCU-35022
Front Panel23
Installation23
Unpacking23
Front Panel Functions23
O TB1 Terminal Block25
O TB2 Terminal Block25
Rear Panel Function25
- Rear Panel25
Top Panel26
Top Panel Function26
Left Side Panel27
Precautions before Installation28
- Operating Environment28
- Installation Area29
Example of Securing the SCU-35030
Attaching the SCU-350 to a Rack30
Cable Connection31
- STP Connection Cable32
STP Pump Connection Cable32
- Power Cable33
Power Cable (Without Plug)33
Power Cable (with Plug)34
How to Secure the Power Cable36
Connecting to Semiconductor Equipment37
- Connecting to Power37
- Emergency off Circuit (EMO Circuit)37
CON4 Connector38
- 3.10.3 Serial Communication39
Remote Communication38
- 3.10.1 Parallel Communication38
Tuning40
- 3.11.2 Tuning Method40
LCD Display State42
Confirmation Mode42
- 3.12.1 Display Items42
- Confirmation Method42
Setting the Rated Speed43
- 3.13.1 When Setting DSW-B No. 1 to on under Power-On State43
- 3.13.2 When Setting DSW-B No. 1 to on before Powering on44
LCD Message in Rated Speed Setting Mode45
Operation47
Before Starting the STP Pump47
- Confirmation before Starting47
- Confirmation of Vacuum System47
Powering on48
- Self Test48
How to Start/Stop the STP Pump48
Manual Start/Stop the STP Pump48
- Starting the STP Pump48
- Stopping the STP Pump49
- Starting the STP Pump after Stopping49
- Starting the STP Pump after a Safety Function Operates49
Remote Operation51
- I/O TB2 Terminal Block51
- I/O TB1 Terminal Block54
Rated Contacts for Relays CR158
Rated Contacts for Relays CR458
- CON4 Connector (for SCU-350H/350HA Only)59
- 4.5.3.1 Remote Input Signals59
CON4 Connector (Remote Input Signal)60
- 4.5.3.2 Remote Output Signals62
CON 4 Connector (Remote Output Signal)63
- Remote Cables for CON4 (for SCU-350H/350HA Only)65
Rated Contacts for Relays CR4, 5, 6, 7, 8, 9 and65
- Remote Setting66
- Starting/Stopping the STP Pump (I/O TB2)66
Starting/Stopping the STP Pump During Remote Operation (I/O TB2)66
- Starting the STP Pump after Stopping (I/O TB2)67
- Starting the STP Pump after a Safety Function Operates (I/O TB2)67
- Starting/Stopping the STP Pump (CON4)67
- Starting the STP Pump after Stopping (CON4)67
Reset Operation During Remote Operation (I/O TB2)67
Starting/Stopping the STP Pump During Remote Operation (CON4)67
- Starting the STP Pump after a Safety Function Operates (CON4)68
Reset Operation During Remote Operation (CON4)68
Powering off68
RS232 Port (CON3)69
Serial Communication Protocol69
Introduction69
Setting up69
- Hardware Connections69
O TB2 Terminal Block70
O TB1 Terminal Block70
- Pin Assignments71
- Serial Settings71
STP Control Unit Rear Panel70
Pin Assignments of Serial Interface Cable (25Pin-25Pin)71
Pin Assignments of Serial Interface Cable (25Pin-9Pin)71
Serial Parameter71
- Communication Mode72
Setting of DSW-B72
- Recommended Items about Communication Cable Installation73
Grounding Example (both Ends Grounding)73
Grounding Example (Single Point Grounding)73
Serial Protocol on the STP75
- SIM Replies to Queries or Commands76
Serial Protocol75
- Overview75
- Sending a Command or Query to the SIM75
Command Syntax76
- Queries77
- List of Queries77
- Description of Individual Queries77
Commands79
- List of Commands79
- Description of Individual Commands79
- Error Message80
Data Formats81
- Pump State81
- Alarm State81
- Alarm Type82
- SIM Control State83
- Parameters83
Maintenance85
Safety Functions85
- Power Failure85
- Operation after a Power Recovery86
States of LCD, Leds and REMOTE Output Signals86
- Abnormal State of Magnetic Bearing87
- Excessive Vibration87
- Motor Driver Overload87
- Overheating Inside the STP Pump87
- Overheating Inside the SCU-35087
- Overspeed88
- Error Messages88
- 6.1.10 Troubleshooting Immediately after Power Failure Occurs88
- 6.1.11 Troubleshooting Immediately after Other Abnormality/Errors Occur89
Troubleshooting When Powering on94
Troubleshooting When Performing the STP Pump Start Operation94
When Error Message Is Not Displayed on LCD94
- Abnormalities When Powering on94
- Abnormalities When Performing Rotational Operation94
Displaying Past Abnormalities/Errors and Accumulated Running-Time95
- Display Method95
Error Records95
Maintenance and Inspection96
- Cleaning96
- Maintenance97
Storage, Transportation and Disposal99
Storage of the SCU-35099
Transporting for Repair or Overhaul99
Disposal100
Service, Spares and Accessories101
Introduction101
Service101
Spares101
Power Cable102
Accessories102

Table of Contents

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