Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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6
MAINTENANCE
6.3 Displaying past abnormalities/errors and accumulated running-time
SCU-350 provides a function that the LCD displays a maximum of eight error messages that occurred
in the past, and a total of running-time in hours (acceleration, rated speed operation, and
deceleration).
6.3.1 Display method
1. Press and hold the "SELECT" switch for approx. 3 seconds or more when the LCD displays a
pump's state message. The LCD displays the accumulated running time and then error messages
that occurred in the past.
The number displayed at the right of the error message is an error sequence number. The smaller
number indicates that the error occurred more recently.
2. To return to the previous pump's state message, press and hold the "SELECT" switch again for
approx. 3 seconds or more, or leave the error message displayed for approx. 20 seconds without
pressing the "SELECT" switch.
A.
Pump operation status
D.
Press "SELECT" switch for approx. 3 sec.
B.
Operating time
E.
Press "SELECT" switch
C.
Error record
F.
Press SELECT switch for approx. 3 sec. or leave
the message displayed for approx. 20 sec.
Figure 41 - Error records
POWER FAILURE 1
RUN: ******hrs
NORMAL: ***00rpm
LEVITATION
D
A
B
C
E
E
･ ･
PUMP OVERTEMP 8
E
C
F