Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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1
INTRODUCTION
1.6.1 Cable sets
The following cable sets (optional accessories) are used with the SCU-350 and STP pump:
STP connection cable - STP pump to SCU-350.
Power cable - SCU-350 to power supply.
Note: Figure 7 shows a typical TMS system installation. System connections and cables differ
according to the type of pump connected to the SCU-350. Refer to the STP pump Instruction
Manual (A) and (B) for full details of connection cables and system connections.
1 Vacuum equipment 8 Remote cable
2 Inlet port 9 To vacuum equipment control circuit
3 Inlet port flange 10 Outlet port flange
4 To power supply 11 Vacuum valve
5 Power cable 12 Dry pump, and other
6 SCU-350 control unit 13 Backing pump
7 STP connection cable
* STP pump can be installed through the damper (optional accessory)
Figure 7 - Configuration of the STP pump
11
10
7
8
5
1
3
*
4
12
13
6
2
9