SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 53
4
Pin Description
(5)
(17)
REMOTE
N.O OUT
Pins for outputting the STP pump REMOTE SELECTION state signal.
When the MANUAL/REMOTE changeover switch on the STP front panel is
set to ON (remote side), these pins are closed (REMOTE operation).
However, during power failure backup operation, this signal is not output.
(6)
(18)
ROTATION
N.O OUT
Pin for outputting the rotational state signal.
These pins are closed when the STP pump is in rotation.
However, during power failure backup operation, this signal is not output.
(It corresponds to the pin for outputting the "POWER ON" signal of the
STP-200/300/400 series.)
(7)
(19)
EMERGENCY
OPERATION
N.O OUT
Pins for outputting the EMERGENCY OPERATION state signal.
These pins are closed when failures are detected as follows.
Abnormal state of magnetic bearing
Excessive Vibration
However, during power failure backup operation, this signal is not output.
(8)
(20)
FAILURE
N.O OUT
Pins for outputting the FAILURE state signal.
These pins are closed when failures are detected as follows.
Motor driver overload
Overheating inside the STP pump
Overheating inside the STP control unit
Overspeed
However, during power failure backup operation, this signal is not output.
(9)
(21)
OVER
TEMPERATUR
N.O OUT
Pins for outputting the OVER TEMPERATURE state signal.
These pins are closed when overheating inside the STP pump is detected.
However, during power failure backup operation, this signal is not output.
(11)
(23)
ACCELERATION
N.O OUT
Pins for outputting the ACCELERATION state signal.
These pins are closed when the STP pump is in acceleration.
(11)
(24)
NORMAL
OPERATION
N.O OUT
Pins for outputting the NORMAL OPERATION state signal.
These pins are closed when the STP pump is in rated operation.
(10)
(22)
Not used.
(It corresponds to the pin for outputting the "BATTERY OPERATION"
signal of the STP-200/300/400 series.)
(12)
Not used. It is connected to the frame ground.
Table 13 - CON 4 connector (Remote output signal)
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