Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 54
4
OPERATION
(5)
(17)
(6)
(18)
(7)
(19)
(8)
(20)
CR10
(9)
(21)
CR9
(11)
(23)
CR8
(24)
CR7
(10)
(22)
(12)
FG
CR4
CR5
CR6
A. STP control unit F. OVER TEMPERATURE state
signal output pins
B. Remote selection state
signal output pins
G. ACCELERATION state
signal output pins
C. Rotational state
signal output pins
H. NORMAL OPERATION state
signal output pins
D. EMERGENCY OPERATION
state signal output pins
I. Not used
E. FAILURE state
signal output pins
J. Frame ground
Figure 31 - CON4 remote output signal connector
A
B
C
D
E
F
G
H
I
J