Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 83
6
MAINTENANCE
Referred
section
3.9
.1
3.9
.1
Table 29 - Error messages after self test (continued)
Countermeasures
Perform tuning after
power
ON/OFF
operation.
When the error is displayed
after tuning, contact Service
office.
Perform tuning after
power
ON/OFF
operation.
When the error is displayed
after tuning, contact Service
office.
Probable causes
1.
Failure of the STP pump.
2.
Failure of the SCU-350.
1.
Failure of the STP pump.
2.
Failure of the SCU-350.
Pump operation
Touch down. The
magnetic bearing
output stops and the
rotor is descended
on the
touch down
bearing.
Rotation is
inoperative
.
Touch
down. The
magnetic bearing
output stops and the
rotor is descended
on the
touch down
bearing.
Rotation is
inoperative
.
Occurrence condition
Abnormal end of self test
Tuning failure.
LCD Messages
TEST ERROR
TUNING ERROR
1
: :
TUNING ERROR
5