Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 82
6
MAINTENANCE
Referred
section
5.1.1
3.8.2
3.8.2
2.1
Instru
ction
manual
(B)
Instruction
manual
(B)
4.1.
2
4.1.
3
3.8.1
*1
The driver output stops and the rotor continues rotating by inertia. It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table 28 - Error messages after self test (continued)
Countermeasures
1.
Check whether or not a
power failure has occurred.
2.
Connect the power cable
correctly.
3.
Replace the power cable.
4.
Set the voltage to the
rated voltage
±
10%
.
1.
Set the temperature of the
baking heater to 120 ºC (248 ºF) or less.
2.
At the time of baking or
gas pumping, always cool
the STP pump.
3.
Check the piping system
for leakage.
4.
Repetitions start/stop
operations may cause th
e
STP
p
ump to overheat.
Contact Service office.
1.
Connect the cable
correctly. If the cable connector is not locked, lock it securely.
2.
Failure of the STP
connection cable.
3.
Disconnection of the
temperature sensor of the
STP pump.
Probable causes
1.
Power failure.
2.
Incorrect connection of the
power cable.
3.
Failure of the power cable.
4.
Insufficient power supply
voltage.
1.
Overheating during baking.
2.
Insufficient cooling.
3.
Leakage of the vacuum
piping system.
4.
Repetition start/stop.
operations.
Failure of the SCU
-350.
1.
Overheating during baking.
2.
Insufficient cooling.
3.
Leakage of the vacuum
piping system.
Pump operation
Decelerate and stop.
Decelerate and stop.
Free run
*1
Decelerate and stop.
Occurrence condition
Insufficient power supply.
Overheating inside
the
STP
pump.
Abnormal memory
Disconnection of the
temperature sensor of the
STP pump.
LCD Messages
POWER FAILURE
PUMP OVERTEMP
RAM ERROR
THERMAL ERROR