Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 40
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OPERATION
A. Breaker ON I. Start operation of the STP pump
B. Version <Manual operation>
C. Execute self test STP pump can be started with
D. Self test completed either message displayed:
E. Levitation state "LEVITATION"
F. Acceleration state "BRAKE: ***00rpm"
G. Normal operation state <Remote operation>
H. Brake state STP pump can be started with
any message displayed.
J. Stop operation of the STP Pump
The STP pump can be stopped by manual or
remote operation with any message
displayed.
Figure 27 - Operational procedures
P021* ver.*.**
SELF
T
EST
NORMAL: ***00rpm
T
EST
COMPLETE
ACCEL: ***00rpm
LEVITATION
E
F
C
G
I
A
J
ACCEL: ***00rpm
H
B
D