Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page iii
PAGE
iii
CONTENTS (CONTINUED)
Section Title Page
5.4 Commands 69
5.4.1 List of commands 69
5.4.1.1 Description of individual commands 69
5.4.2 Error message 70
5.5 Data Formats 71
5.5.1 Pump state 71
5.5.2 Alarm state 71
5.5.3 Alarm type 72
5.5.4 SIM control state 73
5.5.5 Parameters 73
6 MAINTENANCE 75
6.1 Safety functions 75
6.1.1 Power failure 75
6.1.2 Operation after a power recovery 76
6.1.3 Abnormal state of magnetic bearing 77
6.1.4 Excessive vibration 77
6.1.5 Motor driver overload 77
6.1.6 Overheating inside the STP pump 77
6.1.7 Overheating inside the SCU-350 77
6.1.8 Overspeed 78
6.1.9 Error Messages 78
6.1.10 Troubleshooting immediately after power failure occurs 78
6.1.11 Troubleshooting immediately
after other abnormality/errors occur 79
6.2 When error message is not displayed on LCD 84
6.2.1 Abnormalities when powering ON 84
6.2.2 Abnormalities when performing rotational operation 84
6.3 Displaying past abnormalities/errors
and accumulated running-time 85
6.3.1 Display method 85
6.4 Maintenance and inspection 86
6.4.1 Cleaning 86
6.4.2 Maintenance 87
7 STORAGE, TRANSPORTATION AND DISPOSAL 89
7.1 Storage of the SCU-350 89
7.2 Transporting for repair or overhaul 89
7.3 Disposal 90
8 SERVICE, SPARES AND ACCESSORIES 91
8.1 Introduction 91
8.2 Service 91
8.3 Spares 91
8.4 Accessories 92