Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Safety instruction label 4
3 Caution label 4
4 Connector caution label 5
5 Label affixing positions 6
6 SCU-350 control unit 7
7 Configuration of the STP pump 8
8 SCU-350 dimensions (mm) 12
9 SCU-350 front panel 13
10 SCU-350 rear panel 15
11 SCU-350 top panel 16
12 SCU-350 left side panel 17
13 Installing the SCU-350 19
14 Example of securing the SCU-350 20
15 STP pump connection cable 22
16 Power cable (without plug) 23
17 Power cable (with plug) 24
18 Connecting method of the power cable without plug 25
19 How to secure the power cable 26
20 I/O TB1 terminal block 28
21 I/O TB2 terminal block 28
22 CON4 connector 28
23 CON3 connector (D-sub 25) 29
24 Tuning procedures 31
25 LCD display state 32
26 LCD message in rated speed setting mode 35
27 Operational procedures 40
28 I/O TB2 remote input signal terminal block 43
29 I/O TB1 remote output signal terminal block 47
30 CON4 remote input signal connector 51
31 CON4 remote output signal connector 54
32 Connection PC with SIM 59
33 STP Control Unit Rear Panel 60
34 Setting of DSW-B 62
35 Grounding example (Both ends grounding) 63
36 Grounding example (single point grounding) 63
37 Example of ring ferrite core installation 64
38 Example of cable installation in metallic duct 64
39 Serial protocol on the STP 65
40 Command syntax 66
41 Error records 85