Edwards SCU-350 Series

SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-350 front panel functions 14
3 SCU-350 rear panel function 15
4 SCU-350 top panel function 16
5 SCU-350 left side panel function 17
6 Power cable 24
7 I/O TB2 terminal block 42
8 I/O TB1 terminal block 45
9 Rated contacts for relays CR1, 3, 5, 7, 8 48
10 Rated contacts for relays CR4, 6 48
11 CON4 connector (Remote input signal) 50
12 Rated coils for relays CR1, 2 and 3 51
13 CON 4 connector (Remote output signal) 53
14 Rated contacts for relays CR4, 5, 6, 7, 8, 9 and 10 55
15 Remote cable connections (Single-side connector type) 55
16 Starting/Stopping the STP pump
during remote operation (I/O TB2) 56
17 Reset operation during remote operation (I/O TB2) 57
18 Starting/Stopping the STP pump
during remote operation (CON4) 57
19 Reset Operation during Remote Operation (CON4) 58
20 RS232 Port (CON3) 59
21 Pin Assignments of Serial Interface Cable (25pin-25pin) 61
22 Pin Assignments of Serial Interface Cable (25pin-9pin) 61
23 Serial Parameter 61
24 Remote Input / Output Signal 62
25 States of LCD, LEDs and REMOTE output signals
at a power failure 76
26 Error messages after self test 80
27 Error messages after self test (continued) 81
28 Error messages after self test (continued) 82
29 Error messages after self test (continued) 83
30 Troubleshooting when powering ON 84
31 Troubleshooting
when performing the STP pump start operation 84