SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
Page 68
5
SERIAL COMMUNICATION PROTOCOL
3. ?P Pump state
See Section 5.5.1 for pump state and Section 5.5.2 for alarm state.
Syntax SIM reply
?P Status level, Alarm state
Example: 3, 0
4. ?Vx Parameters
See Section 5.5.5 for value corresponding to the parameters.
Syntax SIM reply Example
?V1 Total hours 10 (10 hours)
?V2 Motor temperature 80 (80 ºC)
?V3 Rotational speed 15000 (15000 rpm)
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