SCU-350 Series Control Unit for Turbomolecular Pump
MT-21E-201-E
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TECHNICAL DATA
Operation switch START (Non-locking push-button / Green)
STOP (Non-locking push-button / Red)
RESET (Non-locking push-button / White)
SELECT (Non-locking push-button / White)
MANUAL/REMOTE changeover
(Slide switch• Grey)
Panel indication LED ACCEL. (Green LED)
NORMAL (Green LED)
BRAKE (Yellow LED)
POWER (Green LED)
FAILURE (Red LED)
REMOTE (Green LED)
Panel display LCD (1 lines of 16 characters)
Input/Output terminal AC POWER CON1 (3 pins)
P.CONNECTOR CON2 (45 pins)
I/O TB1 (20 pins)
I/O TB2 (6 pins)
CON3 (25 pins, optional accessory)
CON4 (24 pins, for SCU-350H/350HA only)
Safety function Electromagnetic bearing failure detection
STP pump overheat detection
Motor driver overload detection
Power failure detection
STP pump overspeed detection
STP control unit overheat detection
Other failure detection