SCU-800 Control Unit for Turbomolecular Pump
SERIAL COMMUNICATION
PROTOCOL
5.4.2 ReadMeas
Function: Reads the measured rotational speed.
Transmission frame:
56-bits hexadecimal
coded ASCII
Measured rotational speed
16-bits hexadecimal
coded ASCII
Example:
Measured rotational speed: 02DC
hex
= 732 Hz = 43,920 rpm
*1
System reservation
5.4.3 Command
Function: Sends the pump operation commands START, STOP and RESET. These commands
function in the same way as when each switch of the SCU-800 is pressed. They are valid when
MANUAL/REMOTE changeover switch on the SCU-800 is "ON". Refer to Section 3.11, "Parameter
set mode".
Transmission frame: