SCU-800 Control Unit for Turbomolecular Pump
7.5 Error at self test state
When an abnormality/error occurs during the self test while operating the ON switch, the safety
function operates, the "FAILURE" LED illuminates and an alarm signal is output from the REMOTE X7
connector (see Table 10). An error message showing "CAUTION" on the upper line and the contents
of the error are displayed on the lower line of the LCD. If an abnormality/error is found, take measures
in accordance with Table 33.
The different STP pump is
used after the tuning is
performed.
Section 4.2.2
Section 3.9.1
Failure of the SCU-800 or
STP pump.
Failure of the SCU-800 or
STP pump.
The STP pump of a different
model is used after the
tuning is performed.
Section 4.2.2
Section 3.9.1
Failure of the SCU-800 or
STP pump.
The inappropriate STP pump
is used.
Confirm if the appropriate
STP pump is connected.
Tuning Error 1
:
:
Tuning Error 19
After turning OFF and ON,
perform turning.
If the RESET operation does
not reset error message,
contact Service office.
Turning is not completed.
The control parameter is not
in the memory of the STP
pump.
Table 33 - Error messages at self test state