Edwards SCU-800 - Pump Operation Mode

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 87
5
SERIAL COMMUNICATION
PROTOCOL
Pump operation mode
Value
Levitation
1
No Levitation
2
Acceleration
3
Normal
4
Deceleration (Brake)
5
Autotest
6
Tuning
7
Tuning Complete
8
(Updating control loop S/W)
9
(Waiting to Update Driver S/W)
10
(Updating Driver S/W)
11
Table 24 - Pump operation mode
Example:
Pump operation mode
: 01
hex
= 1 = Levitation
The number of error
: 02
hex
= 2 errors
Error 1
: 0D
hex
= 13 = Disturbance Xh
Error 2
: 0F
hex
= 15 = Disturbance Xb
Error 3 to 77
: 00
hex
= No error detected
Parameter
1
2
3
4
5
6
7
8
9
10
11
ASCII
0
1
0
2
0
D
0
F
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
31
30
32
30
44
30
46
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
12
13
[
Omitted]
68
69
70
71
72
73
74
75
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
76
77
78
79
ASCII
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30