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Edwards SCU-800

Edwards SCU-800
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SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 90
5
SERIAL COMMUNICATION
PROTOCOL
5.4.8 ReadSetPoint
Function: Reads the setting value of the "Speed Set Point" and TMS temperature. The "Speed Set
Point" data is the same data as that of "ReadSpeedSetPoint".
Transmission frame:
PC->SIM
Stx
0
0
1
?
d
Etx
LRC
SIM->PC
Ack
PC->SIM
Ack
SIM->PC
Stx
0
0
1
Sp
d
Parameter 1 to 2
Etx
LRC
Parameter
Item
Data format
Remarks
1
Speed Set Point
(Unit: Hz)
16-bits hexadecimal coded
ASCII
2
TMS temperature setting
(Unit: ºC)
16-bits hexadecimal coded
ASCII
Example:
Speed Set Point
: 01F4
hex
= 500 Hz = 30,000 rpm
TMS temperature setting
: 003C
hex
= 60 ºC (140 ºF)
Parameter
1
2
ASCII
0
1
F
4
0
0
3
C
HEX
30
31
46
34
30
30
33
43
5.4.9 ReadMotorTemp
Function: Reads the measured motor temperature.
Transmission frame:
PC->SIM
Stx
0
0
1
?
e
Etx
LRC
SIM->PC
Ack
PC->SIM
Ack
SIM->PC
Stx
0
0
1
Sp
e
Parameter 1
Etx
LRC

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