SCU-800 Control Unit for Turbomolecular Pump
SERIAL COMMUNICATION
PROTOCOL
The number of
"Error Record"
8-bits hexadecimal coded
ASCII
Error Record 1 to
Error Record 10
8-bits hexadecimal coded
ASCII
*1
Value corresponding to the error message is transmitted (refer to Table 22 and Table 23). The most recent error has the
smallest parameter number. When the number of errors being detected is under the maximum number, the value of
parameter that is larger than the number of errors has been detected is set to 0.
Example:
When 3 errors have been detected in the past;
The number of "Error Record"
: 0F
hex
= 15 = Disturbance Xb
: 0D
hex
= 13 = Disturbance Xh
: 15
hex
= 21 = T.Cable Disconnected
: 00
hex
= No error recorded
5.4.12 SetSpeedSetPoint
Function: Changes the "Speed Set Point" value. This value can be changed in the range from half of
the rated rotational speed to the rated rotational speed.
CAUTION
There is an endurance limit of setting changes (no more than 24 times per day for about ten years).
If this limit is exceeded, it not only may become impossible to change the setting but can also cause
pump failure. Do not make setting changes in excess of this endurance limit.
Transmission frame: