SCU-800 Control Unit for Turbomolecular Pump
4.6.1 Starting the STP pump after stopping
Perform the start operation to accelerate the STP pump. Refer to Section 4.5.4. The STP pump can be
accelerated even while it is stopping.
4.6.2 Starting the STP pump after a safety function operates
A safety function operates when an abnormality/error occurs in the STP pump or peripheral equipment.
To restart the STP pump, remove the cause of the abnormality/error after the "BRAKE" LED
extinguishes and perform the operation shown in Table 14. The "FAILURE" LED extinguishes and the
safety function is released (RESET operation). Restart the STP pump. For the safety functions and
troubleshooting, refer to Section 6.
Short the circuit between (1)-(22) for 0.3 seconds or more.
Table 14 - Reset operation during remote operation (REMOTE X7)
4.7 Powering OFF
Turn the MAIN POWER "OFF" on the SCU-800 rear panel when all three LEDs "ACCEL.", "NORMAL"
and "BRAKE" extinguish. The magnetic bearing stops, the rotor stops, and the "POWER" LED
extinguishes. (POWER OFF state)
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