SCU-800 Control Unit for Turbomolecular Pump
3.11 Parameter set mode
Parameter set mode is used to set the different parameters of the STP pump and SCU-800.
3.11.1 Remote operation setting
The remote parallel port (I/O REMOTE), serial port COM1, serial port COM2, and STP-Link are fitted
on the SCU-800 as standard connectors for the remote operation. The hardware is selected for the
remote operation setting of the start, stop and reset. Refer to Section 4.5, Section 5 and Section 6 for
the remote operating methods. The remote output monitoring the operating state can be output with
any hardware.
3.11.2 Rotational speed setting
The rotational speed can be changed in units of 500 rpm in the NORMAL state. The variable range is
from half of the rated speed to the rated speed. The rated speed is different according to the connected
pump.
3.11.3 TMS setting
Enable/Disable the TMS control function.
When the TMS control function is set to enable, the setting of the pump air-cooling fan output is
disabled automatically.
3.11.4 Rotational inhibit signal setting
Enable/Disable the rotation inhibit signal.
3.11.5 Emergency vent valve setting
Enable/Disable the emergency vent valve function. When a failure of the magnetic bearing is detected,
in the state of effective, 24 DCV is output between the TMS connector X5-19 pin and 20 pin. Disable
the function when the emergency vent valve is not fitted on the STP pump connected to the SCU-800.
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