Edwards SCU-800

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 37
3
INSTALLATION
Remote Mode
COM1
Remote Mode
I/O Remote
Remote Mode
STP-Link
Levitation
Remote Mode
COM2
NORM:******rpm
……
Speed Set Point
xxxx rpm
Speed Set Point
xxxx rpm
TMS Function
DISABLE
TMS Function
ENABLE
Inhibit Command
DISABLE
Inhibit Command
ENABLE
LEAK VALVE Option
DISABLE
LEAK VALVE Option
ENABLE
A
B
C
D
UP
DOWN
ENTER
SELECT
E
F
SELECT
UP
+
Remote Mode
COM3:RS485/Lon/D-Net
I
Second Damage Limit
DISABLE
Second Damage Limit
ENABLE
Cooling Fan Option
DISABLE
Cooling Fan Option
ENABLE
G
H
Figure 23 - Parameter setting method
A.
Operation mode
F.
Emergency vent valve setting
B.
Select remote mode
G.
Second Damage Limit setting
C.
Rated speed setting
H.
Cooling fan setting
D.
TMS function setting
I.
To Warning function setting
E.
INHIBIT function setting