SCU-800 Control Unit for Turbomolecular Pump
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit)
If the temperature of the STP pump base unit is higher than the setting value by 10 ºC (18 ºF) or more
due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE" LED
illuminates and the LCD displays error message "TMS Higher Temp". The heater is switched OFF and
the cooling water unit is operated. The STP pump decelerates and stops. Continue to operate the
cooling water unit while "TMS Higher Temp" is displayed after the pump stops.
If the temperature of the STP pump base unit is lower than the setting value by 10 ºC (18 ºF) or more
due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE" LED
illuminates and the LCD displays the error message "TMS Lower Temp". The heater and the cooling
water valve are switched OFF and the STP pump decelerates and stops.
Note: "TMS Lower Temp" is not detected for a certain time when the STP pump starts.
When an abnormality/error occurs in the TMS connection cable, the STP pump decelerates and stops.
The heater and the cooling water unit are switched OFF.
The "FAILURE" LED illuminates and the LCD displays the error message "T.Cable Disconnect".
7.1.10 Failure of the air-cooling fan
When the air-cooling fan in the SCU-800 locks and stops, the "FAILURE" LED illuminates and the
LCD displays error message "Driver Failure" and "Driver Fan Failure". The STP pump decelerates
and stops.
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