SCU-800 Control Unit for Turbomolecular Pump
3.11.6 Second Damage Limit setting
Enable/Disable the rotational operation after "Second Damage Limit" occurs. When setting to
"ENABLE", "START NOT ALLOWED" is displayed and the rotational operation cannot be performed.
When setting to "DISABLE", "Second Damage Limit" is displayed, though the rotational operation can
be performed.
3.11.7 Pump air-cooling fan output setting
When the output voltage of the air-cooling fan of the STP pump is set to "ENABLE", the input power
supply voltage is output to the output terminal of the TMS connector X5 in the "ACCEL" state or
"NORMAL" state. The air-cooling fan can be used as a replacement of the TMS heater.
When the air-cooling fan of the pump is set to "ENABLE", the TMS function is set to "DISABLE"
automatically.
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