Edwards SCU-800

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 42
3
INSTALLATION
3.12 Manual operation mode
The operation of the TMS heater, TMS water valve, pump air-cooling fan, and the emergency vent
valve can be inspected in manual operation mode. However, the manual operation cannot be
performed in the remote operation or using different TMS voltage.
1. Press the "DOWN" and "SELECT" switches simultaneously to enter Manual Mode, then "Manual
Operation TMS Heater OFF" is displayed.
2. Press "UP" switch to display "TMS Heater ON", and the TMS Heater output turns "ON".
Press "DOWN" switch to display "TMS Heater OFF", and the TMS Heater output turns "OFF".
3. Press "SELECT" switch to display "TMS Water Valve Close", and the TMS water valve can be
operated manually with "UP" and "DOWN" switches.
4. Press "SELECT" switch to display "Cooling Fan OFF", "Leak Valve Close".
5. Press "SELECT" switch in the Emergency vent valve operation to return to the Operation Mode.
Levitaion NORM:******rpm
Manual Operation
TMS Heater OFF
Manual Operation
TMS Heater ON
Manual Operation
TMS Water Valve Close
Manual Operation
TMS Water Valve Open
SELECT
UP
DOWN
DOWN
+
SELECT
UP
DOWN
Manual Operation
Cooling Fan OFF
Manual Operation
Cooling Fan ON
SELECT
UP
DOWN
Manual Operation
Leak Valve Close
Manual Operation
Leak Valve Open
SELECT
UP
DOWN
SELECT
Figure 27 - Manual operation method
A.
Operation mode
D.
Air-cooling fan
B.
TMS heater
E.
Emergency vent valve
C.
TMS water valve
UP
DOWN
ENTER
SELECT
A
B
C
D
E