Edwards SCU-800 User Manual

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 3
1.3.3 Disclaimer 3
1.3.4 Spare parts 3
1.4 Labels 4
1.5 Label affixing positions 6
1.6 General description 7
1.6.1 Cable sets 8
2 TECHNICAL DATA 9
2.1 SCU-800 specifications 9
3 INSTALLATION 13
3.1 Unpacking 13
3.2 Front panel 13
3.3 Rear panel 16
3.4 Precautions before installation 17
3.4.1 Operating environment 17
3.4.2 Insulation test 17
3.4.3 Installation area 18
3.5 Attaching the SCU-800 to a rack 19
3.6 Cable connection 20
3.6.1 STP connection cable 21
3.6.2 TMS connection cable 22
3.6.3 Power cable 23
3.7 Connecting to semiconductor equipment 25
3.7.1 Connecting to power 25
3.7.2 Emergency off circuit (EMO circuit) 25
3.8 Remote communication 26
3.8.1 Parallel communication 26
3.8.2 Serial communication 26
3.9 Adjustment methods 27
3.9.1 Tuning 27
3.9.2 Tuning method 27
3.9.3 Change of data after tuning 29
3.10 Confirmation mode 30
3.10.1 Confirmation method 30
3.11 Parameter set mode 32

Edwards SCU-800 Specifications

General

Brand	Edwards
Model	SCU-800
Category	Control Unit
Language	English