SCU-800 Control Unit for Turbomolecular Pump
CONTENTS (CONTINUED)
Section Title Page
3.11.1 Remote operation setting 32
3.11.2 Rotational speed setting 32
3.11.3 TMS setting 32
3.11.4 Rotational inhibit signal setting 32
3.11.5 Emergency vent valve setting 32
3.11.6 Second Damage Limit 33
3.11.7 Pump air-cooling fan output setting 33
3.11.8 Warning function setting 34
3.11.9 Serial port COM1 setting 35
3.11.10 Serial port COM2 setting 35
3.11.11 Serial port COM3 setting 35
3.11.12 Date/Time setting 35
3.11.13 Factory setting 35
3.11.14 Parameter setting procedure 36
3.12 Manual operation mode 42
4 OPERATION 43
4.1 Before starting the STP pump 43
4.1.1 Confirmation before starting 43
4.1.2 Confirmation of vacuum system 43
4.2 Powering ON 44
4.2.1 Self test 44
4.2.2 "CAUTION" message in the self test state 44
4.3 How to start/stop the STP pump 45
4.4 Manual start/stop the STP pump 45
4.4.1 Starting the STP pump 45
4.4.2 Stopping the STP pump 45
4.4.3 Starting the STP pump after stopping 45
4.5 Remote operation 47
4.5.1 Input signal pins 47
4.5.2 Output signal pins 49
4.5.3 Remote setting 52
4.5.4 Starting/Stopping the STP pump 52
4.6 Rotation INHIBIT signal 53
4.6.1 Starting the STP pump after stopping 54
4.6.2 Starting the STP pump after a safety function operates 54
4.7 Powering OFF 54
4.8 Operating the TMS unit (for use with the TMS unit) 55
4.8.1 Before starting 55
4.8.2 Starting/Stopping 55
4.8.3 Setting the TMS unit function 55
4.8.4 Temperature control 55
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