SCU-800 Control Unit for Turbomolecular Pump
CONTENTS (CONTINUED)
Section Title Page
5 SERIAL COMMUNICATION PROTOCOL 57
5.1 Introduction 57
5.2 Connection and setting up 58
5.2.1 Signal connection 58
5.2.2 Connecting the RS485 60
5.2.3 Communication parameter setting 62
5.2.4 Recommended items about communication cable installation 63
5.3 Protocol specifications 66
5.3.1 General description 66
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 67
5.3.3 Control command
(in the RS232/RS485 single point connection) 68
5.3.4 Query command (in the RS232/RS485 single point connection)69
5.3.5 Transmission data format 70
5.3.6 Frame control (checksum) 70
5.3.7 Error control 71
5.3.8 Transmission frame in the RS485 multi-point connection 72
5.3.9 Control command in the RS485 multi-point connection 73
5.3.10 Query command in the RS485 multi-point connection 75
5.3.11 Broadcasting command in the RS485 multi-point connection 76
5.3.12 Application note 77
5.4 Command specifications 81
5.4.1 Command list 81
5.4.2 ReadMeas 82
5.4.3 Command 82
5.4.4 ReadFailMess 83
5.4.5 ReadModFonct 86
5.4.6 ReadVersion 88
5.4.7 ReadCounters 89
5.4.8 ReadSetPoint 90
5.4.9 ReadMotorTemp 90
5.4.10 ReadStatus 91
5.4.11 ReadEvents 92
5.4.12 SetSpeedSetPoint 93
5.4.13 ReadSpeedSetPoint 94
5.4.14 ReadModFonctWithWarning 95
5.4.15 ReadMeasValue 98
6 STP-LINK 101