Edwards SCU-800 User Manual

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
7 MAINTENANCE 103
7.1 Safety functions 103
7.1.1 Power failure 103
7.1.2 Operation after a power recovery 104
7.1.3 Abnormal state of magnetic bearing 104
7.1.4 Excessive vibration 105
7.1.5 Motor driver overload 105
7.1.6 Overheating inside the STP pump 105
7.1.7 Overheating inside the SCU-800 105
7.1.8 Overspeed 105
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 106
7.1.10 Failure of the air-cooling fan 106
7.2 "WARNING" message function 107
7.2.1 "WARNING" message display function 107
7.3 "WARNING" message description 108
7.3.1 Damage point function 108
7.3.2 First damage limit 108
7.3.3 Second damage limit 108
7.3.4 Imbalance X_H, X_B, Z 109
7.3.5 Pump run time over 109
7.3.6 Pump overload 109
7.3.7 Low RTC battery 109
7.4 "WARNING" function setting 110
7.5 Error at self test state 111
7.5.1 Error after self test 112
7.5.2 Error messages 112
7.5.3 Troubleshooting immediately after power failure occurs 112
7.5.4 Troubleshooting immediately
after other abnormality/errors occur 113
7.6 When error message is not displayed on LCD 121
7.6.1 Abnormalities when powering ON 121
7.6.2 Abnormalities when performing rotational operation 121
7.6.3 Other abnormalities 122
7.7 "Error Record" message display function 122
7.8 Maintenance and inspection 123
7.8.1 Replacing the fuses 123
7.8.2 Cleaning 124
7.8.3 Maintenance 124
8 STORAGE, TRANSPORTATION AND DISPOSAL 125
8.1 Storage of the SCU-800 125
8.1.1 Transporting for repair or overhaul 125
8.2 Disposal 126

Edwards SCU-800 Specifications

General

Brand	Edwards
Model	SCU-800
Category	Control Unit
Language	English