Edwards SCU-800

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SCU-800 Control Unit for Turbomolecular Pump

MT-49E-101-G

Page v

PAGE

CONTENTS (CONTINUED)

Section Title Page

9 SERVICE, SPARES AND ACCESSORIES 127

9.1 Introduction 127

9.2 Service 127

9.3 Spares 127

9.4 Accessories 128

Main Page

Declaration of Conformity2
Table of Contents5
Introduction13
Scope and Definitions13
Applied Standards14
Limited Warranty14
- Warranty Period14
- Item Warranted15
- Disclaimer15
- Spare Parts15
High Voltage Device Caution Label16
Voltage Caution Label16
Labels16
Voltage Rating Label17
Safety Instruction Label18
Connector Caution Label18
Label Affixing Positions18
Turbomolecular Pumps19
- Cable Sets20
General Description19
Technical Data21
- Specifications21
Installation25
Unpacking25
Front Panel25
Rear Panel28
Precautions before Installation29
- Operating Environment29
- Insulation Test29
- Installation Area30
Example of Securing the SCU-80031
Attaching the SCU-800 to a Rack31
Cable Connection32
- STP Connection Cable33
STP Connection Cable Specification33
- TMS Connection Cable34
STP Pump Connection Cable33
TMS Connection Cable (Standard)34
TMS Connection Cable (STP-A1603 Series)34
- Power Cable35
Connecting to Semiconductor Equipment37
- Connecting to Power37
- Emergency off Circuit (EMO Circuit)37
Connector X3A, X3B, X6 (D-Sub 9)38
Remote Communication38
- Parallel Communication38
- Serial Communication38
Adjustment Methods39
- Tuning39
- Tuning Method39
- Change of Data after Tuning41
Remote Mode41
Confirmation Mode42
- Confirmation Method42
Parameter Set Mode44
- Remote Operation Setting44
- Rotational Speed Setting44
- TMS Setting44
- Rotational Inhibit Signal Setting44
- Emergency Vent Valve Setting44
- Second Damage Limit45
- Pump Air-Cooling Fan Output Setting45
- Warning Function Setting46
- Serial Port COM1 Setting47
- Serial Port COM2 Setting47
- Serial Port COM3 Setting47
- Date/Time Setting47
- Factory Setting47
- Parameter Setting Procedure48
Parameter Setting Method49
Parameter Setting Method (Continued)50
Parameter Setting Method (Continued)53
Manual Operation Mode54
Manual Operation Method54
Operation55
Before Starting the STP Pump55
- Confirmation before Starting55
- Confirmation of Vacuum System55
Powering on56
- Self Test56
- CAUTION" Message in the Self Test State56
How to Start/Stop the STP Pump57
Manual Start/Stop the STP Pump57
- Starting the STP Pump57
- Stopping the STP Pump57
- Starting the STP Pump after Stopping57
Remote Operation59
- Input Signal Pins59
REMOTE X7 Input Signal Pins60
- Output Signal Pins61
REMOTE X7 Input Signal Pins61
REMOTE X7 Output Signal Pins62
REMOTE X7 Output Signal Pins63
- Remote Setting64
- Starting/Stopping the STP Pump64
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)64
Rotation INHIBIT Signal Input65
- Starting the STP Pump after Stopping66
- Starting the STP Pump after a Safety Function Operates66
Rotation INHIBIT Signal65
Powering off66
Operating the TMS Unit (for Use with the TMS Unit)67
- Before Starting67
- Starting/Stopping67
- Setting the TMS Unit Function67
- Temperature Control67
Serial Communication Protocol69
Introduction69
Serial Communication69
Connection and Setting up70
- Signal Connection70
Connector X3A/X3B (D-Sub 9)70
X6 Pin Position71
- Connecting the RS48572
- Communication Parameter Setting74
Communication Parameters74
- Recommended Items about Communication Cable Installation75
Grounding Example (both Ends Grounding)75
Grounding Example (Single Point Grounding)75
Protocol Specifications78
- General Description78
Pump Operation Commands78
- Standard Transmission Frame (in the RS232/RS485 Single Point Connection)79
- Control Command80
- (In the RS232/RS485 Single Point Connection)80
- Transmission Data Format82
- Frame Control (Checksum)82
- Error Control83
- Transmission Frame in the RS485 Multi-Point Connection84
- Control Command in the RS485 Multi-Point Connection85
- Query Command in the RS485 Multi-Point Connection87
- Broadcasting Command in the RS485 Multi-Point Connection88
Pump Operation Commands88
- Application Note89
Example of Answer Resending Process90
Example of Command Sending During Answer Data Reply90
Example of Command Sending Process92
Example of Answer Receiving Process92
Command Specifications93
- Command List93
- Readmeas94
- Command94
- Readfailmess95
Error Message Values97
- Readmodfonct98
Error Message Values (Continued)98
Pump Operation Mode99
- Readversion100
Control Unit100
- Readcounters101
- Readsetpoint102
- Readmotortemp102
- Readstatus103
- Readevents104
- Setspeedsetpoint105
- Readspeedsetpoint106
- Readmodfonctwithwarning107
- Readmeasvalue110
Stp-Link113
Maintenance115
Safety Functions115
- Power Failure115
Backup Rotational Speed115
- Operation after a Power Recovery116
- Abnormal State of Magnetic Bearing116
States of LCD, Leds and REMOTE Output Signals at a Power Failure116
- Excessive Vibration117
- Motor Driver Overload117
- Overheating Inside the STP Pump117
- Overheating Inside the SCU-800117
- Overspeed117
- Abnormality/Error in the TMS Unit (for Use with the TMS Unit)118
- Failure of the Air-Cooling Fan118
WARNING" Message Function119
- WARNING" Message Display Function119
WARNING" Message Description120
- Damage Point Function120
- First Damage Limit120
- Second Damage Limit120
- Imbalance X_H, X_B, Z121
- Pump Run Time over121
- Pump Overload121
- Low RTC Battery121
Default Setting of "WARNING" Function122
Factory Setting and Variable Range122
WARNING" Function Setting122
Error Messages at Self Test State123
- Error after Self Test124
- Error Messages124
- Troubleshooting Immediately after Power Failure Occurs124
- Troubleshooting Immediately after Other Abnormality/Errors Occur125
Error at Self Test State123
Troubleshooting When Powering on133
Troubleshooting When Performing the STP Pump Start Operation133
- Other Abnormalities134
When Error Message Is Not Displayed on LCD133
- Abnormalities When Powering on133
- Abnormalities When Performing Rotational Operation133
Troubleshooting While the STP Pump Is Rotating134
Error Record" Message Display Function134
Maintenance and Inspection135
- Replacing the Fuses135
- Cleaning136
- Maintenance136
Storage, Transportation and Disposal137
Storage of the SCU-800137
- Transporting for Repair or Overhaul137
Disposal138
Service, Spares and Accessories139
Introduction139
Service139
Spares139
Power Cable140
Accessories140

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