SCU-800 Control Unit for Turbomolecular Pump
ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Voltage caution label 4
3 Safety instruction label 5
4 Connector caution label 5
5 Voltage rating label 5
6 Label affixing positions 6
7 SCU-800 control unit 7
8 Configuration of the STP pump with the TMS 8
9 SCU-800 dimensions (mm) 11
10 SCU-800 front panel 13
11 SCU-800 rear panel 16
12 Installing the SCU-800 18
13 Example of securing the SCU-800 19
14 STP pump connection cable 20
15 TMS connection cable (standard) 22
16 TMS connection cable (STP-A1603 series) 22
17 Power cable 23
18 Connecting method of the power cable without plug 24
19 REMOTE X7 connector 26
20 Connector X3A, X3B, X6 (D-sub 9) 26
21 Tuning procedures 28
23 Parameter setting method 37
24 Parameter setting method (continued) 38
25 Parameter setting method (continued) 39
26 Parameter setting method (continued) 41
27 Manual operation method 42
28 Operational procedures 46
29 REMOTE X7 input signal pins 49
30 REMOTE X7 output signal pins 51
31 Serial communication 57
32 Connector X3A/X3B (D-sub 9) 58
33 Connector X6 (D-sub 9) 59
34 RS485 connections 60
35 FAILSAFE bias resistance 61
36 Grounding example (Both ends grounding) 63
37 Grounding example (single point grounding) 63
38 Example of ring ferrite core installation 64
39 Example of cable installation in metallic duct 64
40 Example of differential signal waveform 65
41 PC to SIM communication 66
42 Block diagram of communication process example 77
43 Example of answer resending process 78
44 Example of response when the command is sent continuously 78
45 Example of command sending during answer data reply 78
46 Example of communication cycle process 79
47 Example of command sending process 80
48 Example of answer receiving process 80
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