SCU-800 Control Unit for Turbomolecular Pump
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-800 front panel functions 14
3 SCU-800 front panel functions (continued) 15
4 SCU-800 rear panel connection 16
5 STP connection cable specification 21
6 Power cable 24
7 User setting data list 29
8 Causes of "CAUTION" at the self test state 44
9 REMOTE X7 input signal pins 48
10 REMOTE X7 output signal pins 50
11 Rated contacts for relays CR1 to CR10 52
12 Starting/Stopping the STP pump
during remote operation (REMOTE X7) 52
13 Rotation INHIBIT signal input 53
14 Reset operation during remote operation (REMOTE X7) 54
15 X3A/X3B pin position 58
16 X6 pin position 59
17 Communication parameters 62
18 Transmission control characters 66
19 Pump operation commands 76
20 Command list 81
21 Pump operation commands 83
22 Error message values 85
23 Error message values (continued) 86
24 Pump operation mode 87
25 Remote mode 92
26 Warning value bit assign 96
27 Functions of STP-Link 101
28 Backup rotational speed 103
29 States of LCD, LEDs and REMOTE output signals
at a power failure 104
30 Accumulated damage point and warning message 108
31 Default setting of "WARNING" function 110
32 Factory setting and variable range 110
33 Error messages at self test state 111
34 Error messages after self test 114
35 Error messages after self test (continued) 115
36 Error messages after self test (continued) 116
37 Error messages after self test (continued) 117
38 Error messages after self test (continued) 118
39 Error messages after self test (continued) 119
40 Error messages after self test (continued) 120
41 Troubleshooting when powering ON 121
42 Troubleshooting
when performing the STP pump start operation 121
43 Troubleshooting while the STP pump is rotating 122
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