Edwards SCU-800

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Declaration of Conformity2
Table of Contents5
Introduction13
Scope and Definitions13
Applied Standards14
Limited Warranty14
- Warranty Period14
- Item Warranted15
- Disclaimer15
- Spare Parts15
High Voltage Device Caution Label16
Voltage Caution Label16
Labels16
Voltage Rating Label17
Safety Instruction Label18
Connector Caution Label18
Label Affixing Positions18
Turbomolecular Pumps19
- Cable Sets20
General Description19
Technical Data21
- Specifications21
Installation25
Unpacking25
Front Panel25
Rear Panel28
Precautions before Installation29
- Operating Environment29
- Insulation Test29
- Installation Area30
Example of Securing the SCU-80031
Attaching the SCU-800 to a Rack31
Cable Connection32
- STP Connection Cable33
STP Connection Cable Specification33
- TMS Connection Cable34
STP Pump Connection Cable33
TMS Connection Cable (Standard)34
TMS Connection Cable (STP-A1603 Series)34
- Power Cable35
Connecting to Semiconductor Equipment37
- Connecting to Power37
- Emergency off Circuit (EMO Circuit)37
Connector X3A, X3B, X6 (D-Sub 9)38
Remote Communication38
- Parallel Communication38
- Serial Communication38
Adjustment Methods39
- Tuning39
- Tuning Method39
- Change of Data after Tuning41
Remote Mode41
Confirmation Mode42
- Confirmation Method42
Parameter Set Mode44
- Remote Operation Setting44
- Rotational Speed Setting44
- TMS Setting44
- Rotational Inhibit Signal Setting44
- Emergency Vent Valve Setting44
- Second Damage Limit45
- Pump Air-Cooling Fan Output Setting45
- Warning Function Setting46
- Serial Port COM1 Setting47
- Serial Port COM2 Setting47
- Serial Port COM3 Setting47
- Date/Time Setting47
- Factory Setting47
- Parameter Setting Procedure48
Parameter Setting Method49
Parameter Setting Method (Continued)50
Parameter Setting Method (Continued)53
Manual Operation Mode54
Manual Operation Method54
Operation55
Before Starting the STP Pump55
- Confirmation before Starting55
- Confirmation of Vacuum System55
Powering on56
- Self Test56
- CAUTION" Message in the Self Test State56
How to Start/Stop the STP Pump57
Manual Start/Stop the STP Pump57
- Starting the STP Pump57
- Stopping the STP Pump57
- Starting the STP Pump after Stopping57
Remote Operation59
- Input Signal Pins59
REMOTE X7 Input Signal Pins60
- Output Signal Pins61
REMOTE X7 Input Signal Pins61
REMOTE X7 Output Signal Pins62
REMOTE X7 Output Signal Pins63
- Remote Setting64
- Starting/Stopping the STP Pump64
Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)64
Rotation INHIBIT Signal Input65
- Starting the STP Pump after Stopping66
- Starting the STP Pump after a Safety Function Operates66
Rotation INHIBIT Signal65
Powering off66
Operating the TMS Unit (for Use with the TMS Unit)67
- Before Starting67
- Starting/Stopping67
- Setting the TMS Unit Function67
- Temperature Control67
Serial Communication Protocol69
Introduction69
Serial Communication69
Connection and Setting up70
- Signal Connection70
Connector X3A/X3B (D-Sub 9)70
X6 Pin Position71
- Connecting the RS48572
- Communication Parameter Setting74
Communication Parameters74
- Recommended Items about Communication Cable Installation75
Grounding Example (both Ends Grounding)75
Grounding Example (Single Point Grounding)75
Protocol Specifications78
- General Description78
Pump Operation Commands78
- Standard Transmission Frame (in the RS232/RS485 Single Point Connection)79
- Control Command80
- (In the RS232/RS485 Single Point Connection)80
- Transmission Data Format82
- Frame Control (Checksum)82
- Error Control83
- Transmission Frame in the RS485 Multi-Point Connection84
- Control Command in the RS485 Multi-Point Connection85
- Query Command in the RS485 Multi-Point Connection87
- Broadcasting Command in the RS485 Multi-Point Connection88
Pump Operation Commands88
- Application Note89
Example of Answer Resending Process90
Example of Command Sending During Answer Data Reply90
Example of Command Sending Process92
Example of Answer Receiving Process92
Command Specifications93
- Command List93
- Readmeas94
- Command94
- Readfailmess95
Error Message Values97
- Readmodfonct98
Error Message Values (Continued)98
Pump Operation Mode99
- Readversion100
Control Unit100
- Readcounters101
- Readsetpoint102
- Readmotortemp102
- Readstatus103
- Readevents104
- Setspeedsetpoint105
- Readspeedsetpoint106
- Readmodfonctwithwarning107
- Readmeasvalue110
Stp-Link113
Maintenance115
Safety Functions115
- Power Failure115
Backup Rotational Speed115
- Operation after a Power Recovery116
- Abnormal State of Magnetic Bearing116
States of LCD, Leds and REMOTE Output Signals at a Power Failure116
- Excessive Vibration117
- Motor Driver Overload117
- Overheating Inside the STP Pump117
- Overheating Inside the SCU-800117
- Overspeed117
- Abnormality/Error in the TMS Unit (for Use with the TMS Unit)118
- Failure of the Air-Cooling Fan118
WARNING" Message Function119
- WARNING" Message Display Function119
WARNING" Message Description120
- Damage Point Function120
- First Damage Limit120
- Second Damage Limit120
- Imbalance X_H, X_B, Z121
- Pump Run Time over121
- Pump Overload121
- Low RTC Battery121
Default Setting of "WARNING" Function122
Factory Setting and Variable Range122
WARNING" Function Setting122
Error Messages at Self Test State123
- Error after Self Test124
- Error Messages124
- Troubleshooting Immediately after Power Failure Occurs124
- Troubleshooting Immediately after Other Abnormality/Errors Occur125
Error at Self Test State123
Troubleshooting When Powering on133
Troubleshooting When Performing the STP Pump Start Operation133
- Other Abnormalities134
When Error Message Is Not Displayed on LCD133
- Abnormalities When Powering on133
- Abnormalities When Performing Rotational Operation133
Troubleshooting While the STP Pump Is Rotating134
Error Record" Message Display Function134
Maintenance and Inspection135
- Replacing the Fuses135
- Cleaning136
- Maintenance136
Storage, Transportation and Disposal137
Storage of the SCU-800137
- Transporting for Repair or Overhaul137
Disposal138
Service, Spares and Accessories139
Introduction139
Service139
Spares139
Power Cable140
Accessories140

Edwards SCU-800

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