Edwards SCU-800 - Page 58

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 46
4
OPERATION
Software Version
49_A *.*
Levitation
TMS TEMP : **°C
Autotest complete
ACCEL : ***00rpm
TMS TEMP :** °C
NORM : ***00rpm
TMS TEMP :** °C
BRAKE : ***00rpm
TMS TEMP :** °C
I
H
G
F
B
E
Autotest
2002/MAY/20 15:40
C
A
K
J
Autotest
STP-603/1003
D
Figure 28 - Operational procedures
A.
MAIN POWER "ON"
E.
Self test completed
(upper only)
H.
Normal Operation State
Upper: Normal operation state
Lower: TMS actual temp
(for only with TMS unit)
B.
Version
C.
Self test
Upper: Autotest
Lower: Date
F.
Levitation State
Upper: Levitation state
Lower: TMS actual temp
(for only with TMS unit)
I.
Break State
Upper: Brake state
Lower: TMS actual temp
(for only with TMS unit)
D.
Self test
Upper: Autotest
Lower: Model of
connected pump
G.
Acceleration State
Upper: Acceleration state
Lowe: TMS actual temp
(for only with TMS unit)
J.
Start operation of the STP pump
K.
Stop operation of the STP pump