Edwards SCU-800

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 120
7
MAINTENANCE
Referred
section
Instruction manual
(B)
3.11
.3
3.6.2
3.9
.1
Table
40 - Error
messages after self test (continued)
Countermeasures
1. Contact Service office.
2. Contact Service office.
1. Contact Service of
fice.
2. When the TMS function is
not in use, set the TMS function to "DISABLE"
.
3. Connect the cable
correctly. If the cable connector is not locked, lock it securely.
4. Contact Service office.
1. Perform tuning after
power
ON/OFF
operation.
2. When the error is displ
ayed
after tuning, contact Service office.
Probable causes
1. Failure of the TMS heater.
2. Failure of the TMS unit.
1. Disconnection of the TMS
sensor.
2. Incorrect setting of the
TMS function.
3. Disconnection of the TMS
connection cable.
4. Failure of the TMS
connec
tion cable.
1. Failure of the STP
pump.
2. Failure of the SCU
-800.
Pump operation
Decelerate and stop.
Decelerate and stop.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Occurrence condition
TMS temperat
ure control
error (when the TMS unit detection temperature becomes lower than the setting value by 10°C
(-18
ºF) or more.
Error is not
detected for a certain time after the STP pump starts.
TMS sensor is not connected when the state "TMS Function" is "ENAB
LE"
.
Tuning failure.
LCD Messages
TMS Lower Temp
TMS Sensor Lost
Tuning Error 1
: :
Tuning Error
19