Edwards SCU-800 - Page 131

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 119
7
MAINTENANCE
Referred
section
Section
7.3.3
and 3.
12
Section 3.6.2
Section 3.11
.3
Instruction manual
(B)
*1
The driver output stops and the rotor continues rotating by
inertia.
It may take several hours to stop. To stop the STP pump quickly, close the vacuum valve at the outlet port
flange and introduce gas from the purge port into the STP pump.
Table
39 - Error
messages after self test (continued
)
Countermeasures
1. Contact
Service office
.
2. Contact
Service office
.
Overhaul is needed.
Contact
Service office
.
Set "Warning Damage Point" to "DISABLE" to release the error and continue operation temporary.
1. Connect the cable
correctly. If the cable connecto
r is not locked,
lock it securely.
2. Contact
Service office
.
3. When the TMS function is
not in use, set the TMS function to "DISABLE"
.
1. Connect the
electromagnetic cooling water valve correctly. Check the volume of water and water temperature.
2. Contact
Service
office
.
Probable causes
1. STP
pump failure.
2. Failure of the SCU
-800.
Frequency of "Disturbance"
or
"Mains
Failure
" error.
1. Disconnection of the TMS
connection cable.
2. Failure of the TMS
connection cable.
3. Incorrect setting of the
TMS function.
1. Cooling fail
ure of
TMS unit
.
2. Failure of TMS unit.
Pump operation
Free run
*1
Rotation is inoperative
.
Decelerate and stop.
Decelerate and stop.
Occurrence condition
Abnormal rotational speed detection.
"Second Damage Limit" occurs.
TMS connection cable is not connected when the state "TMS Function" is set to "ENABLE"
.
TMS temperature control error (when the TMS unit detection temperature becomes higher than the setting value by 10°C (+18 ºF) or more.
LCD Messages
Speed Pulse Lost
START NOT ALLOWED
T. Cable
Disconnect
TMS Higher Temp