SCU-1601 Control Unit for Turbomolecular Pump
3.9.3 Change of data after tuning
The user setting may be changed because of the change of the configuration of the STP pump and
SCU-1601 after "CAUTION" message is displayed.
Confirm the setting shown in Table 6 after tuning, and reconfigure the setting when the user setting
has changed.
For the setting confirmation, refer to Sections 3.10 and 3.11.
Factory setting
(reference)
(Refer to 3.11.3 TMS setting)
Optional signal output
(Emergency vent valve)
Serial port COM1 driver type
Serial port COM2 driver type
*1 Set the TMS function to "External" for the STP-XA2703BV155 / XA3203BV155 pump. When set to "ENABLE", "TMS
sensor lost" is detected.
Table 6 - User setting data list