SCU-1601 Control Unit for Turbomolecular Pump
8.8 Maintenance and inspection
WARNING
Before carrying out any maintenance or inspections on the STP pump and/or the
SCU-1601, power off the primary power (turn the MAIN POWER "OFF"), confirm
that the LED and LCD are extinguished, and then isolate (Lockout/Tagout) the
electrical energy source, water and gas, and other energy sources on the vacuum
equipment. Failure to do so may result in the inadvertent rotation of the STP pump
which may result in an accident, an electric shock or damage to equipment.
Moreover, an accident caused by water leaks or gas leak may occur.
WARNING
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric
shock or the failure.
CAUTION
DO NOT touch any place other those specified when performing maintenance or inspecting the
pump and NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipments such as a baking heater before performing maintenance and
inspections.
Only Edwards will replace the maintenance parts and will execute repair and overhaul. Contact
Service office.
8.8.1 Cleaning
The method of cleaning the SCU-1601 is shown below.
• Clean the outside of the SCU-1601 with a dry wipe as required.
• When dust has accumulated in the ventilation port, wipe off or vacuum it with the cleaner. In this
case, dust must not enter in the SCU-1601.
• Clean off with a pure gas when dust has accumulated in the connector.
• When the label of the SCU-1601 has been damaged, contact Service office.
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