SCU-1601 Control Unit for Turbomolecular Pump
8.8.2 Maintenance
Regular overhaul (the cost of overhaul will be at your own charge) is required for safety and proper
use of STP control unit. This overhaul includes inspection and cleaning. Internal components of the
STP control unit will deteriorate after long-term use. To prevent unexpected failure by deteriorated
parts, replacement of the main parts is recommended along with an overhaul. Refer to the following
list as recommended maintenance intervals for main parts.
Recommended maintenance intervals
*1
*1 Maintenance intervals of any parts may be shortened depending on the condition of use
The cost of replacing parts due to confirmed deterioration will be at the customers charge, even
though a period is not exceeding the recommended maintenance intervals.
When overhaul of the STP control unit is needed, contact Service office.
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