Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 67
4
OPERATION
4.5.5 Rotation INHIBIT signal
When using rotation INHIBIT signal, set the rotation INHIBIT function to the "ENABLE" according to
Section 3.11, "Parameter set mode". Relations between rotation INHIBIT signal input and pump
operation state are shown in Table 14.
Signal input
Pump operation
After short-circuit of rotation INHIBIT input
signal (A), the START operation is
performed (B).
INHIBIT IN
Close
Open
START operation
<MANUAL/REMOTE operation mode>
● The pump accelerates when the START
operation is performed (B).
After the START operation (A), the rotation
INHIBIT input signal is short-circuited (B).
INHIBIT IN
Close
Open
START operation
< MANUAL operation mode >
● The pump does not accelerate.
< REMOTE operation mode >
● The pump does not accelerate when the
START operation is performed (A).
● The pump accelerates when the rotation
INHIBIT input signal is short-circuited (B).
The rotation INHIBIT input signal is
opened (A) during acceleration or normal
operation.
INHIBIT IN
Close
Open
START operation
< MANUAL/REMOTE operation mode >
● The pump decelerates and stops when the
rotation INHIBIT input signal is opened (A).
● After the operation (A), the pump continues
deceleration and stops even by
short-circuiting the rotation INHIBIT input
signal (B). However, when the START signal
is input, the pump will accelerate.
Table 14 - Rotation INHIBIT signal input
A B
A B
A B