Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 121
5
SERIAL COMMUNICATION PROTOCOL
5.4.17.3 External TMS unit setting
Settings for External TMS unit can be read.
Parameter
Item
Data format
Remark
1
Option function number
16-bits hexadecimal
coded ASCII
001A
hex
2
Output device 1 setting
(see next table)
3
Output device 2 setting
(see next table)
4
Output device 3 setting
(see next table)
5
Output device 4 setting
(see next table)
Parameter
Item
Data format
Remark
n_1
Device name
10-ASCII characters
001A
hex
n_2
Device control type
8-bits hexadecimal
coded ASCII
01
hex
: Heater control
02
hex
: Water valve control
Others : no control
n_3
Temperature 1 low limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_4
Temperature 1 high limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_5
Temperature 2 low limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_6
Temperature 2 high limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_7
Temperature 3 low limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_8
Temperature 3 high limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_9
Temperature 4 low limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII
n_10
Temperature 4 high limit
(Unit: ºC)
8-bits hexadecimal
coded ASCII