Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 122
5
SERIAL COMMUNICATION PROTOCOL
Example1:
“Heat ring” heater will be turned ON at Temperature 1 = 154 ºC or less, and it will be turned OFF at
Temperature 1 = 156 ºC or more.
“Heat ring” heater is NOT controlled by Temperature 2, 3 and 4 due to low limit value > high limit
value.
Device name
:“Heat ring”
Device control type
: 01
hex
: Heater control
Temperature 1 low limit
: 9A
hex
＝154 ºC
Temperature 1 high limit
: 9C
hex
＝156 ºC
Temperature 2 low limit
: 00
hex
＝0 ºC
Temperature 2 high limit
: FF
hex
＝-1 ºC
Temperature 3 low limit
: 00
hex
＝0 ºC
Temperature 3 high limit
: FF
hex
＝-1 ºC
Temperature 4 low limit
: 00
hex
＝0 ºC
Temperature 4 high limit
: FF
hex
＝-1 ºC
Parameter
n_1
n_2
n_3
ASCII
‘H’
‘e’
‘a’
‘t’
‘ ‘
‘r’
‘i’
‘n’
‘g’
‘ ‘
0
1
9
A
HEX
48
65
61
74
20
72
69
6E
67
20
30
31
39
41
Parameter
n_4
n_5
n_6
n_7
n_8
n_2
n_3
ASCII
9
C
0
0
F
F
0
0
F
F
0
0
F
F
HEX
39
43
30
30
46
46
30
30
46
46
30
30
46
46