Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 123
5
SERIAL COMMUNICATION PROTOCOL
Example2:
“Cooling” valve will be closed at Temperature 2 = 79 ºC or less, and it will be opened at Temperature 2
= 81 ºC or more.
“Cooling” valve is NOT controlled by Temperature 1, 3 and 4 due to low limit value > high limit value.
Device name
: “Cooling”
Device control type
: 02
hex
: Water valve control
Temperature 1 low limit
: 00
hex
＝0 ºC
Temperature 1 high limit
: FF
hex
＝-1 ºC
Temperature 2 low limit
: 4F
hex
＝79 ºC
Temperature 2 high limit
: 51
hex
＝81 ºC
Temperature 3 low limit
: 00
hex
＝0 ºC
Temperature 3 high limit
: FF
hex
＝-1 ºC
Temperature 4 low limit
: 00
hex
＝0 ºC
Temperature 4 high limit
: FF
hex
＝-1 ºC
Parameter
n_1
n_2
n_3
ASCII
‘C’
‘o’
‘o’
‘l’
‘i‘
‘n’
‘g’
‘ ’
‘ ’
‘ ‘
0
2
0
0
HEX
43
6F
6F
6C
69
6E
67
20
20
20
30
32
30
30
Parameter
n_4
n_5
n_6
n_7
n_8
n_2
n_3
ASCII
F
F
4
F
5
1
0
0
F
F
0
0
F
F
HEX
46
46
34
46
35
31
30
30
46
46
30
30
46
46