EasyManua.ls Logo

Edwards SCU-1601

Edwards SCU-1601
173 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 134
8
MAINTENANCE
8.1.8 Overspeed
When the rotational speed of the STP pump exceeds the specified rotational value due to a failure in
the motor driver, the MAIN POWER on the SCU-1601 switches "OFF". The STP pump has no power
supplied, decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Overspeed *".
8.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit)
If the temperature of the STP pump heating-cooling part unit is higher than the rating upper value or
more due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE"
LED illuminates and the LCD displays error message "TMS Higher Temp". The heater is switched
OFF and the cooling water unit is operated. The STP pump decelerates and stops. Continue to
operate the cooling water unit while "TMS Higher Temp" is displayed after the pump stops.
If the temperature of the STP pump heating-cooling part unit is lower than the rating lower value or
more due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE"
LED illuminates and the LCD displays the error message "TMS Lower Temp". The heater and the
cooling water valve are switched OFF and the STP pump decelerates and stops.
Note: "TMS Lower Temp" is not detected for a certain time when the STP pump starts. In case of
the standard built-in TMS, the rating upper/lower value are higher/lower than the setting value
by 10 C.
When an abnormality/error occurs in the TMS connection cable, the STP pump decelerates and stops.
The heater and the cooling water unit are switched OFF.
The "FAILURE" LED illuminates and the LCD displays the error message "T.Cable Disconnected".

Table of Contents

Related product manuals