Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 101
5
SERIAL COMMUNICATION PROTOCOL
Error message
Value
Error message
Value
Tuning Error 14
66
Aberrant Accel
73
Tuning Error 15
67
TMS Voltage Mismatch
74
Tuning Error 16
68
Insufficient Supply
75
Tuning Error 17
69
Inordinate Current
76
Tuning Error 18
70
Much MotorCurrent
93
Tuning Error 19
71
External TMS Fail
112
Aberrant Brake
72
AMB Ctrl Lost
114
Table 25 - Error message values (continued)
*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 8 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
5.4.5 ReadModFonct
Function: Reads the pump operation mode and the errors being detected. The data of errors being
detected reads the same data as that of "ReadFailMess".
Transmission frame:
PC->SIM
Stx
0
0
1
?
M
Etx
LRC
SIM->PC
Ack
PC->SIM
Ack
SIM->PC
Stx
0
0
1
Sp
M
Parameter 1 to 34
*1
Etx
LRC
Parameter
Item
Data format
Remarks
1
Pump operation mode
8-bits hexadecimal coded
ASCII
Refer to Table 26
2
The number of error
8-bits hexadecimal coded
ASCII
Up to 32 errors
*1
3 to 34
*1
Error 1
8-bits hexadecimal coded
ASCII
*2
…
…
Error 32
*1
8-bits hexadecimal coded
ASCII
*1 The maximum number of errors may differ depending upon the software version of SCU-1601. It is recommended that an
application be designed as variable-length data.
*2 Value corresponding to the error message is transmitted (refer to Table 24 and Table 25). The most recent error has the
largest parameter number. When the number of errors being detected is under the maximum number, the value of
parameter that is larger than the number of errors being detected is set to 0.