SCU-1601 Control Unit for Turbomolecular Pump
Figure 13 - SCU-1601 rear panel
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign
. DO NOT touch the terminal. Doing so may result in electric
shock. When connecting/disconnecting the connecter, always power off the
SCU-1601 (turn the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical
energy source, water and gas, and other energy sources on the vacuum equipment.
Main power connection (240 Va.c. maximum)
STP motor connection (80 Va.c. maximum)
Serial communication connection RS232/RS485 (shard use)
STP pump connection (58 Va.c. maximum)
Remote connection (30 Vd.c. maximum)
(RS485 serial communication signal pins [COM2])
Built-in TMS unit connection (240 Va.c. maximum)
Protective earth terminal
(M4)
Ground (Earth) connection terminal to prevent electric shock
Table 4 - SCU-1601 rear panel connection