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Edwards SCU-1601

Edwards SCU-1601
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 18
3
INSTALLATION
3.3 Rear panel
1
X2 AC POWER
6
X7 REMOTE
2
MAIN POWER breaker
7
X5 TMS
3
X4 MOTOR
8
PE terminal
4
Serial port COM1 X3A/X3B
9
X9 EdCentra
5
X1 P.CONNECTOR
Figure 13 - SCU-1601 rear panel
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign
. DO NOT touch the terminal. Doing so may result in electric
shock. When connecting/disconnecting the connecter, always power off the
SCU-1601 (turn the MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical
energy source, water and gas, and other energy sources on the vacuum equipment.
Item
Description
Function
1
X2 AC POWER
Main power connection (240 Va.c. maximum)
2
MAIN POWER breaker
Input power switch
3
X4 MOTOR
STP motor connection (80 Va.c. maximum)
4
Serial Port COM1 X3A/X3B
Serial communication connection RS232/RS485 (shard use)
5
X1 P.CONNECTOR
STP pump connection (58 Va.c. maximum)
6
X7 REMOTE
Remote connection (30 Vd.c. maximum)
(RS485 serial communication signal pins [COM2])
7
X5 TMS
Built-in TMS unit connection (240 Va.c. maximum)
8
Protective earth terminal
(M4)
Ground (Earth) connection terminal to prevent electric shock
9
X9 EdCentra
EdCentra connection
Table 4 - SCU-1601 rear panel connection
1
2
3
5
7
6
4
8
9

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